HYDROGEN RELEASE DURING ERD ANALYSIS OF HYDROGEN IN AMORPHOUS-CARBON FILMS PREPARED BY RF-SPUTTERING

被引：34

作者：

FUJIMOTO, F

TANAKA, M

IWATA, Y

OOTUKA, A

KOMAKI, K

HABA, M

KOBAYASHI, K

机构：

[1] MEIDENSHA CO,DIV RES & DEV,TOKYO 141,JAPAN

[2] UNIV TOKYO,NUCL SCI & TECHNOL RES CTR,TOKYO 113,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90684-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：792 / 794

页数：3

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FUJIMOTO F, 1984, JPN J APPL PHYS, V23, P814

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HABA M, 1985, 9TH P S ISIAT, P265

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