Improving lateral resolution of electrostatic force microscopy by multifrequency method under ambient conditions

被引：23

作者：

Ding, X. D. ^{[1
,2
,3
,4
]}

An, J. ^{[3
,4
]}

Xu, J. B. ^{[3
,4
]}

Li, C. ^{[1
,2
]}

Zeng, R. Y. ^{[1
,2
]}

机构：

[1] Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China

[2] Sun Yat Sen Univ, Sch Phys Sci & Engn, Guangzhou 510275, Guangdong, Peoples R China

[3] Chinese Univ Hong Kong, Dept Elect Engn, Shatin, Hong Kong, Peoples R China

[4] Chinese Univ Hong Kong, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2009年 / 94卷 / 22期

关键词：

eigenvalues and eigenfunctions; scanning probe microscopy; surface topography; CONTACT POTENTIAL DIFFERENCE; MODULATION-DETECTION; AMPLITUDE; SURFACES;

D O I：

10.1063/1.3147198

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A multifrequency scanning probe technique which can enhance the spatial resolution of electrostatic force microscopy (EFM) in amplitude-modulation mode under ambient conditions is demonstrated. The first eigenmode of a cantilever is used for topographic imaging, while the second eigenmode is resonantly excited with a sinusoidal modulation voltage applied to the cantilever to measure electrostatic force in lift mode. Two-dimensional images and spectra of electrostatic force are obtained. The lateral resolution of the multifrequency EFM is demonstrated to be better than 15 nm and a theoretical explanation is postulated.

引用

页数：3

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