Micromechanical relay with electrostatic actuation and metallic contacts

被引：36

作者：

Grétillat, MA ^{[1
]}

Grétillat, F ^{[1
]}

de Rooij, NF ^{[1
]}

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1999年 / 9卷 / 04期

关键词：

D O I：

10.1088/0960-1317/9/4/307

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, an improved design of an electrostatic polysilicon microrelay with metallic contacts is presented. The polysilicon layer is used for the actuator while the nickel and gold layers are used for the contacts. Improved contact resistance is demonstrated, as well as the efficiency of multiple contact bars. Moreover, by integrating nickel bars, electromagnetic actuation was successfully performed.

引用

页码：324 / 331

页数：8

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