Nanoscale colloidal particles: Monolayer organization and patterning

被引：133

作者：

Sato, T ^{[1
]}

Hasko, DG ^{[1
]}

Ahmed, H ^{[1
]}

机构：

[1] UNIV CAMBRIDGE,CAVENDISH LAB,MICROELECT RES CTR,CAMBRIDGE CB3 0HE,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 01期

关键词：

D O I：

10.1116/1.589253

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The monolayer deposition of nanoscale colloidal particles (Au citrate sols) was demonstrated by employing an aminofunctional silane [3-(2-Aminoethlyamino) propyltrimethoxysilane] as a coupling agent. The compatibility of this colloidal Au deposition method with conventional electron beam lithography techniques was examined, and the two-dimensional patterning of the Au colloidal monolayer was demonstrated. Using this fabrication method, a proposal for a single electron device structure based on nanoscale (2 nm diameter) gold colloidal particles was made. (C) 1997 American Vacuum Society.

引用

页码：45 / 48

页数：4

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