Kinetics of scanned probe oxidation: Space-charge limited growth

被引：87

作者：

Dubois, E ^{[1
]}

Bubendorff, JL ^{[1
]}

机构：

[1] ISEN, IEMN, CNRS, UMR 8520, F-59652 Villeneuve Dascq, France

来源：

JOURNAL OF APPLIED PHYSICS | 2000年 / 87卷 / 11期

关键词：

D O I：

10.1063/1.373510

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This article proposes an enhanced oxidation model for scanning probe microscope (SPM) nanolithography that reproduces the power-of-time law reported for tip-induced anodic oxidation. It is shown that the space charge resulting from nonstoichiometric states strongly limits the oxidation rate. The direct relationship between the oxide thickness and time is provided by integration of the oxide rate equation. Measurements on SPM-induced oxides generated on a titanium surface are compared to theory. The predominant role of the space charge is corroborated by electrical measurements on oxide barriers that exhibit current fluctuations due to Coulombic effects. (C) 2000 American Institute of Physics. [S0021-8979(00)04310-3].

引用

页码：8148 / 8154

页数：7

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