Application of floatable oxide (FOx-12) for nanometer magnetic particle fabrication

被引:3
作者
Jedrasik, P
Hanson, M
机构
[1] Chalmers Univ Technol, Microtechnol Ctr Chalmers, S-41296 Gothenburg, Sweden
[2] Chalmers Univ Technol, Dept Solid State Phys, S-41296 Gothenburg, Sweden
关键词
electron; lithography; resist; proximity; nanometer; magnetic; particle;
D O I
10.1016/S0167-9317(02)00500-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An application of negative tone electron beam resist FOx-12 for fabrication of nanometer magnetic particles is reported. Thorough resist characterisation is carried out. Proximity tests for characterization of the intraproximity behaviour of the resist on tested substrate are investigated to compensate for modulation of lateral dimensions due to electron scattering. Magnetic particles were fabricated by a combination of EBL and ion beam milling using directly FOx-12 as a transfer layer down to Fe. We fabricated arrays of circular particles with characteristic dimensions down to 40 nm. Initial results of topographic and magnetic force microscopy are reported. (C) 2002 Published by Elsevier Science B.V.
引用
收藏
页码:811 / 817
页数:7
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