Microfabrication of high-aspect ratio and complex monolithic structures in glass

被引：33

作者：

Belloy, E ^{[1
]}

Pawlowski, AG ^{[1
]}

Sayah, A ^{[1
]}

Gijs, MAM ^{[1
]}

机构：

[1] EPFL, Swiss Fed Inst Technol, Inst Microelect & Microsyst, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2002年 / 11卷 / 05期

关键词：

ceramics; erosion; glass; high-aspect ratio; microfabrication; monolithic; powder blasting; suspended microstructure;

D O I：

10.1109/JMEMS.2002.803418

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a novel approach for the realization of complex three-dimensional microstructures in brittle materials, like glass. Our technology is based on a beam of eroding powder particles, etching a masked rotating substrate. By using an oblique powder beam and mask under-etching effects, we fabricate monolithic millimeter-high microstructures with an aspect ratio of 5 to 10. This intrinsically very simple microfabrication method also allows to realize in a unique way free-standing monolithic glass microstructures, suspended over many millimeters.

引用

页码：521 / 527

页数：7

共 14 条

[1] Construction and physical processing of Zeus panels [J].

Baller, TS ;

VanGorkom, GGP ;

Lambert, N ;

Montie, EA ;

Trompenaars, PHF ;

DeZwart, ST .

PHILIPS JOURNAL OF RESEARCH, 1996, 50 (3-4) :463-474

[2] The introduction of powder blasting for sensor and microsystem applications [J].

Belloy, E ;

Thurre, S ;

Walckiers, E ;

Sayah, A ;

Gijs, MAM .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 84 (03) :330-337

[3] Oblique powder blasting for three-dimensional micromachining of brittle materials [J].

Belloy, E ;

Sayah, A ;

Gijs, MAM .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 92 (1-3) :358-363

[4]

BELLOY E, 2001, IN PRESS J MICROELEC

[5] Microstereophotolithography using a liquid crystal display as dynamic mask-generator [J].

Bertsch, A ;

Zissi, S ;

Jezequel, JY ;

Corbel, S ;

Andre, JC .

MICROSYSTEM TECHNOLOGIES, 1997, 3 (02) :42-47

[6] EROSION OF GLASS AS MODELED BY INDENTATION THEORY [J].

BUIJS, M .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (06) :1676-1678

[7]

Ehrfeld W., 1987, P IEEE MICR TEL WORK, P1

[8]

*GFMESST GMBH, PROD INF MIKR

[9] Design and fabrication of topologically complex, three-dimensional microstructures [J].

Jackman, RJ ;

Brittain, ST ;

Adams, A ;

Prentiss, MG ;

Whitesides, GM .

SCIENCE, 1998, 280 (5372) :2089-2091

[10]

MADOU M, 1997, FUNDAMENTALS MICROFA, pCH2

← 1 2 →