共 13 条
[2]
CHEETHAM AD, 1995, UNPUB P 20 AINSE PLA
[3]
Chen F.F., 1965, PLASMA DIAGNOSTIC TE
[4]
Duffey B., 1996, Journal of Electrical and Electronics Engineering, Australia, V16, P91
[6]
Hershkowitz N., 1989, Plasma diagnostics, P113, DOI 10.1016/b978-0-12-067635-4.50008-9
[8]
LANGMUIR PROBE MEASUREMENTS OF ELECTRON-TEMPERATURE AND DENSITY SCALING IN MULTIDIPOLE RADIO-FREQUENCY PLASMAS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1993, 11 (04)
:1199-1205
[9]
THE APPLICATION OF THE HELICON SOURCE TO PLASMA PROCESSING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (02)
:310-317