Effect of substrate temperature on the structural and optical properties of MoO3 thin films prepared by spray pyrolysis technique

被引:163
作者
Bouzidi, A
Benramdane, N
Tabet-Derranz, H
Mathieu, C
Khelifa, B
Desfeux, R
机构
[1] Univ Djillali Liabes, Dept Elect, Lab Elaborat & Caracterisat Mat, Sidi Bel Abbes 22000, Algeria
[2] Univ Artois, Fac Jean Perrin, Ctr Calcul & Modelisat Lens, F-62307 Lens, Artois, France
[3] Univ Artois, Lab Physico Chim Interfaces & Applicat, Lens, Artois, France
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2003年 / 97卷 / 01期
关键词
structural properties; optical properties; molybdenum trioxide;
D O I
10.1016/S0921-5107(02)00385-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of Molybdenum oxide were prepared by spray pyrolysis technique on glass substrates, by using 0.1 M of molybdenum chloride (MoCl5) dissolved in deionized water. Influence of substrate temperature on structural and optical properties is studied in the range from 200 to 300 degreesC. The prepared samples correspond to MoO3 phase with orientation and crystallites size which are modified by deposition temperature, the films prepared at 200 degreesC are monoclinic and the films prepared in the range from 250 to 300 degreesC are polycrystalline with orthorhombic symmetry. The samples present transmission coefficient and optical gap which vary as function of substrate temperature. Gap energy is located between 3.14 and 3.34 eV depending on the substrate temperature. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:5 / 8
页数:4
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