Electrical and optical properties of ZnO:Al films prepared by an evaporation method

被引：64

作者：

Ma, J

Ji, F

Ma, HL

Li, SY

机构：

[1] Inst. Optoelectron. Mat. and Devices, Shandong University, Jinan

来源：

THIN SOLID FILMS | 1996年 / 279卷 / 1-2期

关键词：

conductivity; X-ray diffraction; zinc oxide;

D O I：

10.1016/0040-6090(95)08173-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes the preparation of aluminium-doped zinc oxide films by thermal evaporation of zinc acetate (Zn(CH3COO)(2) . 2H(2)O) and aluminium chloride (AlCl3) onto a heated glass substrate. The structural, optical and electrical properties of the deposited films were investigated. Highly transparent films with a conductivity as high as 2.3 x 10(2) Omega(-1) cm(-1) can be produced by controlling the deposition parameters. The electron carrier densities are in the range (0.2-7) x 10(19) cm(-3) with mobilities of 22-58 cm(2) V-1 s(-1).

引用

页码：213 / 215

页数：3

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