Angular displacement and deformation analyses using a speckle-based wavefront sensor

被引:17
作者
Almoro, Percival F. [1 ]
Pedrini, Giancarlo [2 ]
Anand, Arun [3 ]
Osten, Wolfgang [2 ]
Hanson, Steen G. [1 ]
机构
[1] Danish Tech Univ, Dept Photon Engn, DTU Foton, DK-4000 Roskilde, Denmark
[2] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany
[3] Maharaja Sayajirao Univ Baroda, Fac Engn & Technol, Dept Appl Phys, Vadodara 390001, India
关键词
ANGLE MEASUREMENT; PHASE RETRIEVAL; AUTOCOLLIMATOR; COMPENSATION;
D O I
10.1364/AO.48.000932
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Wavefronts incident on a random phase plate are reconstructed via phase retrieval utilizing axially displaced speckle intensity measurements and the wave propagation equation. Retrieved phases and phase subtraction facilitate the investigations of wavefronts from test objects before and after undergoing a small rotation or deformation without sign ambiguity. Angular displacement (Delta theta) between incident planar wavefronts is determined from the light source vacuum wavelength (lambda) divided by the fringe spacing (Lambda). Fourier analysis of the wavefront phase difference yields a peak frequency that is inversely proportional to Lambda, and the sign gives the direction of rotation. Numerical simulations confirm the experimental results. In the experiments, the smallest Delta theta measured is 0.031 degrees. The technique also permits deformation analysis of a reflecting test object under thermal loading. The technique offers simple, high resolution, noncontact, and whole field evaluation of three-dimensional objects before and after undergoing rotation or deformation. (C) 2009 Optical Society of America
引用
收藏
页码:932 / 940
页数:9
相关论文
共 26 条
[1]   Random phase plate for wavefront sensing via phase retrieval and a volume speckle field [J].
Almoro, Percival F. ;
Hanson, Steen G. .
APPLIED OPTICS, 2008, 47 (16) :2979-2987
[2]   Wavefront sensing using speckles with fringe compensation [J].
Almoro, Percival F. ;
Hanson, Steen G. .
OPTICS EXPRESS, 2008, 16 (11) :7608-7618
[3]   Wavefront sensing with random amplitude mask and phase retrieval [J].
Anand, Arun ;
Pedrini, Giancarlo ;
Osten, Wolfgang ;
Almoro, Percival .
OPTICS LETTERS, 2007, 32 (11) :1584-1586
[4]   Angle measurement using total-internal-reflection heterodyne interferometry [J].
Chiu, MH ;
Su, DC .
OPTICAL ENGINEERING, 1997, 36 (06) :1750-1753
[5]   Distorted laser interferometric angle measurements of a disk drive pivot [J].
Duym, SWR ;
Lumöri, MLD .
IEEE-ASME TRANSACTIONS ON MECHATRONICS, 1998, 3 (04) :265-274
[6]   In situ beam angle measurement in a multi-wafer high current ion implanter [J].
Freer, BS ;
Reece, RN ;
Graf, MA ;
Parrill, T ;
Polner, D .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 237 (1-2) :378-383
[7]   A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers [J].
Gao, W ;
Huang, PSS ;
Yamada, T ;
Kiyono, S .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2002, 26 (04) :396-404
[8]   High-resolution two-dimensional angle measurement technique based on fringe analysis [J].
Ge, ZT ;
Takeda, M .
APPLIED OPTICS, 2003, 42 (34) :6859-6868
[9]   Small-angle measurement based on surface-plasmon resonance and the use of magneto-optical modulation [J].
Guo, JH ;
Zhu, ZM ;
Deng, WM .
APPLIED OPTICS, 1999, 38 (31) :6550-6555
[10]  
Hecht E., 2012, OPTICS