Features of non-additive sputtering for various "molecular projectile-solid" systems

被引：3

作者：

Belykh, SF ^{[1
]}

Kovarsky, AP

Palitsin, VV

Adriaens, A

Adams, F

机构：

[1] Univ Instelling Antwerp, Dept Chem, B-2610 Antwerp, Wilrijk, Belgium

[2] AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia

来源：

APPLIED SURFACE SCIENCE | 2003年 / 203卷

关键词：

atomic and molecular ion bombardment; ion-solid interaction; non-additive sputtering; secondary ion mass spectrometry;

D O I：

10.1016/S0169-4332(02)00713-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In the present work, a comparative study of non-additive sputtering of secondary positive ions from light and heavy targets bombarded by light atomic and molecular projectiles has been studied. It was discovered that, as compared with a light target, non-additive sputtering of a heavy target is increased strongly when the light molecular ions are used as projectiles. The increase of non-additive sputtering is explained by an effect of the back-scattered projectiles who transfer additional energy into the subsurface layers of the target. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：122 / 125

页数：4

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