High-Delta n silica-on-silicon channel waveguides based on sol-gel germanophosphosilicate glass

被引：16

作者：

Syms, RRA

Schneider, VM

Huang, W

Ahmad, MM

机构：

[1] Dept. of Elec. and Electron. Eng., Imperial College, London SW7, Exhibition Road

来源：

ELECTRONICS LETTERS | 1997年 / 33卷 / 14期

关键词：

optical waveguides; sol-gel processing;

D O I：

10.1049/el:19970851

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A process for fabrication of high-Delta n silica-on-silicon channel waveguides by spin-coating and rapid thermal annealing of sol-gel germanophosilicate glass is described. A recipe for the preparation of stable sols and a parameter range for deposition of crack-free films are given. Low and spectrally flat insertion loss is demonstrated for singlemode guides with a Delta n of 1.5 x 10(-2).

引用

页码：1216 / 1217

页数：2

共 6 条

[1] HYDROLYSIS CONDENSATION MECHANISM OF A 2-STEP SOL-GEL PROCESS OF MIXTURES OF TEOS AND TEOG [J].