Software techniques for EELS to realize about 0.3 eV energy resolution using 300 kV FEG-TEM

被引：36

作者：

Kimoto, K ^{[1
]}

Matsui, Y ^{[1
]}

机构：

[1] Natl Inst Mat Sci, Adv Mat Lab, Tsukuba, Ibaraki 3050044, Japan

来源：

JOURNAL OF MICROSCOPY-OXFORD | 2002年 / 208卷 / 03期

关键词：

EELS; energy resolution; field emission gun; script; software; TEM;

D O I：

10.1046/j.1365-2818.2002.01083.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

In this short communication we describe some software techniques for electron energy-loss spectrum measurement. We prepared DigitalMicrograph (Gatan) scripts for multiple spectrum acquisitions, quasi-simultaneous acquisition of low-loss and core-loss spectra, energy drift correction, and other operations. Narrow zero-loss spread of 0.27 eV is demonstrated using a 300 kV field-emission transmission electron microscope (TEM) (Hitachi, HF-3000) and a post-column energy filter (Gatan, GIF2002). The core-loss spectrum is acquired with an energy resolution of 0.36 eV with high reproducibility. The present software techniques effectively achieve the intrinsic energy resolution of electron sources. Sample scripts are provided in the Appendix.

引用

页码：224 / 228

页数：5