MoO3, WO3 single and binary oxide prepared by sol-gel method for gas sensing applications

被引：20

作者：

Galatsis, K

Li, Y

Wlodarski, W

Cantalini, C ^{[1
]}

Passacantando, M

Santucci, S

机构：

[1] Univ Aquila, Dept Chem, I-67040 Laquila, Italy

[2] RMIT Univ, Sch Elect & Comp Syst Engn, Melbourne, Vic 3001, Australia

[3] Univ Aquila, Dipartimento Fis, I-67010 Coppito, Laquila, Italy

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 2003年 / 26卷 / 1-3期

关键词：

gas sensors; thin films; metal oxides; nitrogen dioxide; carbon monoxide;

D O I：

10.1023/A:1020710808151

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

MoO3, WO3 single and Mo/W binary compounds at different Mo/W atomic percentages were deposited by sol-gel spin coating technique on Si/Si3N4 substrates provided with Pt interdigital electrodes and annealed at 450degreesC for 1 h. Films were characterized by SEM, grazing incidence XRD and XPS techniques. Electrical responses to different gases were obtained by exposing the films to 30 ppm CO and 1 ppm NO2. Increasing the Mo/W content the selectivity to NO2 is enhanced. Gas responses resulted to be influenced by the Mo/W weight ratio, films morphology and amount of crystalline phases.

引用

页码：1097 / 1101

页数：5

共 12 条

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