Electrodeposited copper inductors for intraocular pressure telemetry

被引:42
作者
Puers, R [1 ]
Vandevoorde, G [1 ]
De Bruyker, D [1 ]
机构
[1] Katholieke Univ Leuven, Dept ESAT MICAS, B-3001 Heverlee, Belgium
关键词
D O I
10.1088/0960-1317/10/2/305
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A microsystem for wireless long-term measurement of the intraocular pressure is presented. The sensing element is a novel distributed parallel-resonant inductive-capacative circuit. with a pressure-dependent resonance frequency. This circuit is bared upon a twofold on-chip deposited inductor. The high Q inductor is deposited by electrodeposition of copper on a micromachined chip incorporating a pressure-sensitive diaphragm. Test structures were fabricated and characterized. Q factors of 30 at 45 MHz and inductance values of 0.4 mu H are obtained for 3 x 3 mm(2) structures.
引用
收藏
页码:124 / 129
页数:6
相关论文
共 11 条
  • [1] BRUGGEMAN A, 1994, THESIS KU LEUVEN
  • [3] COLLINS GJ, 1999, EUR SEMICOND, P41
  • [4] CROLS J, 1996, P S VLSI TECH, P28
  • [5] DENBESTEN C, 1993, THESIS TU DELFT
  • [6] Perturbation of the flow of current to a disk electrode by an insulating sphere
    Fransaer, J
    Bouet, V
    Celis, JP
    Gabrielli, C
    Huet, F
    Maurin, G
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (12) : 4181 - 4189
  • [7] MOKWA W, 1998, P MICR S DELFT, P69
  • [8] ROMANKIW LT, 1987, 1987 P S EL TECHN SA, P13
  • [9] Rosengren L., 1992, Journal of Micromechanics and Microengineering, V2, P202, DOI 10.1088/0960-1317/2/3/021
  • [10] VANSCHUYLENBERG K, 1991, P 1 EUR C BIOM ENG N, P194