Electrodeposited copper inductors for intraocular pressure telemetry

被引：42

作者：

Puers, R ^{[1
]}

Vandevoorde, G ^{[1
]}

De Bruyker, D ^{[1
]}

机构：

[1] Katholieke Univ Leuven, Dept ESAT MICAS, B-3001 Heverlee, Belgium

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2000年 / 10卷 / 02期

关键词：

D O I：

10.1088/0960-1317/10/2/305

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A microsystem for wireless long-term measurement of the intraocular pressure is presented. The sensing element is a novel distributed parallel-resonant inductive-capacative circuit. with a pressure-dependent resonance frequency. This circuit is bared upon a twofold on-chip deposited inductor. The high Q inductor is deposited by electrodeposition of copper on a micromachined chip incorporating a pressure-sensitive diaphragm. Test structures were fabricated and characterized. Q factors of 30 at 45 MHz and inductance values of 0.4 mu H are obtained for 3 x 3 mm(2) structures.

引用

页码：124 / 129

页数：6