Modifications of the Utrecht AMS set-up have resulted in C-14 analysis with a routine 0.4% analytical precision and a detection limit of 2.0 x 10(-15). In analysis with Be-10, Al-26 and Cl-36 the precision is a few percent and the detection limit 10(-14). Measurements on small carbon samples (< 0.4 mg) revealed a sample-mass dependent isotope fractionation effect, which together with the background limits the precision for the smallest samples (0.02 mg) to a few percent.