QUANTUM-MECHANICAL EFFECTS ON SPUTTER SOURCE ISOTOPE FRACTIONATION

被引：18

作者：

NADEAU, MJ

KIESER, WE

BEUKENS, RP

LITHERLAND, AE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 29卷 / 1-2期

关键词：

D O I：

10.1016/0168-583X(87)90209-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：83 / 86

页数：4

共 9 条

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