A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM

被引:363
作者
Clayton, Garrett M. [5 ]
Tien, Szuchi [4 ]
Leang, Kam K. [3 ]
Zou, Qingze [2 ]
Devasia, Santosh [1 ]
机构
[1] Univ Washington, Dept Mech Engn, Seattle, WA 98195 USA
[2] Iowa State Univ, Dept Mech Engn, Ames, IA 50011 USA
[3] Univ Nevada, Dept Mech Engn, Reno, NV 89557 USA
[4] Natl Cheng Kung Univ, Dept Mech Engn, Tainan 701, Taiwan
[5] Villanova Univ, Dept Mech Engn, Villanova, PA 19085 USA
来源
JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME | 2009年 / 131卷 / 06期
关键词
feedforward; iterative methods; nanopositioning; robust control; scanning probe microscopy; ATOMIC-FORCE MICROSCOPY; ITERATIVE LEARNING CONTROL; VIBRATION COMPENSATION; OUTPUT TRACKING; POLY(ETHYLENE OXIDE); INVERSE-FEEDFORWARD; PIEZOELECTRIC TUBE; CONTROL ISSUES; SOFT SAMPLES; DESIGN;
D O I
10.1115/1.4000158
中图分类号
TP [自动化技术、计算机技术];
学科分类号
080201 [机械制造及其自动化];
摘要
Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs.
引用
收藏
页码:1 / 19
页数:19
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