共 9 条
[2]
CANHAM LT, Patent No. 2005001910
[4]
LONI A, 2006, 5 INT C POR SEM SCI
[5]
PIETSCH GJ, 1995, APPL PHYS A-MATER, V60, P347, DOI 10.1007/BF01538334
[8]
WILLIAMS RM, 1983, AM CERAM SOC BULL, V62, P607
[9]
1999, SEMICONDUCTOR WAFER