Phase-selective CVD of vanadium oxide nanostructures

被引：43

作者：

Mathur, S. ^{[1
]}

Ruegamer, T. ^{[1
]}

Grobelsek, I. ^{[1
]}

机构：

[1] Leibniz Inst New Mat, Dept Nanorystalline Mat & Thin Film Syst, D-66041 Saarbrucken, Germany

来源：

CHEMICAL VAPOR DEPOSITION | 2007年 / 13卷 / 01期

关键词：

molecular precursor; nanostructured films; vanadium oxide;

D O I：

10.1002/cvde.200606578

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Phase-selective synthesis of crystalline vanadium oxides is achieved by the CVD of vanadium oxo-tri-isopropoxide [VO((OPr)-Pr-i)(3)]. Preformed V-O and V=O units and their differential thermal stability present in the precursor enabled precise modulation of the vanadium/oxygen stoichiometry in the products of the CVD. No additional oxygen carrier is employed during the deposition processes. Subject to deposition temperature (400-700 degrees C), different phase compositions (V2O5, V7O13, and VO2) are directly obtained and are investigated regarding structural and electrical properties. Hall measurements on VO2 films show a sharp metal-to-semiconductor transition at 78 degrees C (single crystal, 68 degrees C) depending on their microstructure formed by an oriented aggregation of individual crystallites.

引用

页码：42 / 47

页数：6

共 30 条

[1] Theoretical insight into the nature of ammonia adsorption on vanadia-based catalysts for SCR reaction
Anstrom, M
Dumesic, JA
Topsoe, NY
[J]. CATALYSIS LETTERS, 2002, 78 (1-4) : 281 - 289
[2] In situ UV-visible spectroscopic measurements of kinetic parameters and active sites for catalytic oxidation of alkanes on vanadium oxides
Argyle, MD
Chen, KD
Iglesia, E
Bell, AT
[J]. JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (06) : 2414 - 2420
[3] Highly oriented V2O5 nanocrystalline thin films by plasma-enhanced chemical vapor deposition
Barreca, D
Armelao, L
Caccavale, F
Di Noto, V
Gregori, A
Rizzi, GA
Tondello, E
[J]. CHEMISTRY OF MATERIALS, 2000, 12 (01) : 98 - 103
[4] Chang JY, 2003, B KOR CHEM SOC, V24, P613
[5] Electrochemical properties of vanadium oxide aerogels and aerogel nanocomposites
Dong, W
Sakamoto, J
Dunn, B
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2003, 26 (1-3) : 641 - 644
[6] Temperature-programmed desorption study of the selective oxidation of alcohols on silica-supported vanadium oxide
Feng, T
Vohs, JM
[J]. JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (06) : 2120 - 2127
[7] Structural, electrical and optical properties of pulsed laser deposited VO2 thin films on R- and C-sapphire planes
Garry, G
Durand, O
Lordereau, A
[J]. THIN SOLID FILMS, 2004, 453 : 427 - 430
[8] Mechanism of the vanadium oxide-catalyzed selective reduction of NO by NH3. A quantum chemical modeling
Gilardoni, F
Weber, J
Baiker, A
[J]. JOURNAL OF PHYSICAL CHEMISTRY A, 1997, 101 (34) : 6069 - 6076
[9] Fabrication of vanadium oxide thin film with high-temperature coefficient of resistance using V2O5/V/V2O5 multi-layers for uncooled microbolometers
Han, YH
Choi, IH
Kang, HK
Park, JY
Kim, KT
Shin, HJ
Moon, S
[J]. THIN SOLID FILMS, 2003, 425 (1-2) : 260 - 264
[10] Comparison between vanadium dioxide coatings on glass produced by sputtering, alkoxide and aqueous sol-gel methods
Hanlon, TJ
Walker, RE
Coath, JA
Richardson, MA
[J]. THIN SOLID FILMS, 2002, 405 (1-2) : 234 - 237

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