Properties of laser cut LTCC heaters

被引：43

作者：

Kita, J ^{[1
]}

Dziedzic, A ^{[1
]}

Golonka, LJ ^{[1
]}

Bochenek, A ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Inst Microsyst Technol, PL-50370 Wroclaw, Poland

来源：

MICROELECTRONICS RELIABILITY | 2000年 / 40卷 / 06期

关键词：

D O I：

10.1016/S0026-2714(00)00008-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This article describes fabrication and properties of buried microheaters made inside low temperature co-fired ceramics (LTCC) structures. Laser cutting is used for meander pattern generation in dried Pt, PtAu or PdAg conductive pads. The electrical characterisation of microheaters is based on measurement and analysis of R(T) dependence in the range from 20 degrees C to 850 degrees C, measurement and analysis of thermal dynamic properties, long-term high-temperature passive or active ageing and behaviour of the heater in a pulse operation mode. The presented results are very promising for application of LTCC microheaters in various microsystem devices. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：1005 / 1010

页数：6

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