Characteristics of spray pyrolytic ZnO:In thin films grown from zinc acetate and indium nitrate

The structural, electrical and optical properties of indium doped zinc oxide films, grown by spray pyrolysis are reported. The starting solution was zinc acetate diluted in a mixture of isopropyl alcohol and water to 0.1 M, the doping solution was an aqueous solution of indium nitrate. The films were grown at substrate temperatures ranging from 675 K to 800 K. X-ray diffraction and micrographs indicate that the films are polycrystalline with textured surfaces having a predominance of the (002) and (101) reflections, depending on the substrate temperature. They have a resistivity as low as 6 x 10(-5) Ohm m and a transmittance better than 85% in the visible range. (C) 1997 American Vacuum Society. [S0734-2101(97)01406-1].