Growth and surface analysis of BaTiO3 ultrathin film fabricated by laser molecular beam epitaxy

被引：1

作者：

Cui, DF

Chen, ZH

Zhao, T

Chen, F

Lu, HB

Zhou, YL

Yang, GZ

Huang, HZ

Zhang, HX

机构：

[1] Chinese Acad Sci, Inst Phys, Lab Opt Phys, Beijing 100080, Peoples R China

[2] Chinese Acad Sci, Ctr Condensed Matter Phys, Beijing 100080, Peoples R China

[3] Peking Univ, Inst Phys Chem, Beijing 100871, Peoples R China

来源：

MICROELECTRONIC ENGINEERING | 2000年 / 51-2卷

关键词：

laser MBE; BaTiO3 ultrathin film; ARXPS; terminated surface;

D O I：

10.1016/S0167-9317(99)00523-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The ferroelectric BaTiO3(001) ultrathin film (10 nm) was grown epitaxially on SrTiO3(001) substrate by laser molecular beam epitaxy (MBE). The growth process of the BaTiO3 thin film was characterized by in situ intensity oscillation of reflection high energy electron diffraction, showing a unit cell layer-by-layer growth mode. The atomically smooth surface of BaTiO3 film has been observed by atomic force microscopy with a root mean square surface roughness of 0.2 nm. The top-most surface for the high c-oriented BaTiO3 thin film was analyzed by angle-resolved X-ray photoelectron spectroscopy (ARXPS), indicating the BaTiO3 film is predominantly terminated with TiO2 atomic plane. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：601 / 604

页数：4

共 8 条

[1] X-ray photoemission spectroscopy of La0.67Ca0.33MnO3 films [J].