Preparation of highly (100)-oriented PLCT thin films on Pt/Ti/SiO2/Si substrates by a simple sol-gel process

被引：18

作者：

Fu, XR ^{[1
]}

Li, JH

Song, ZT

Zhu, XR

Lin, CL

机构：

[1] Chinese Acad Sci, Shanghai Inst Met, Natl Lab Funct Mat Informat, Shanghai 200050, Peoples R China

[2] Jiansu Inst Petrochem Technol, Funct Mat Lab, Changzhou 213016, Peoples R China

来源：

MATERIALS LETTERS | 2000年 / 44卷 / 02期

基金：

中国国家自然科学基金;

关键词：

lend titanate; ferroelectricity; pyroelectric; sol-gel;

D O I：

10.1016/S0167-577X(00)00004-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Highly (100)-oriented lanthanum- and calcium-modified PbTiO3 (PLCT68/17/15 and PLCT80/10/10) ferroelectric thin films were successfully prepared on Pt/Ti/SiO2/Si substrates by a simple sol-gel spin-on process. The effects of thin film composition, film thickness and annealing temperature on the (100) orientation were reported. Highly (100)-oriented PLCT80/10/10 and PLCT68/17/15 thin films with pure perovskite could be obtained with around 0.3 and 0.45 mu m thicknesses, respectively, when annealed at 600 degrees C for 1 h. The films' crystallization and orientation were studied using the techniques of X-ray diffraction (XRD) and atomic force microscopy (AFM). (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：70 / 74

页数：5

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