Vibration-resistant direct-phase-detecting optical interferometers

被引：6

作者：

Carlson, TB

Denzer, SM

Greenlee, TR

Groschen, RP

Peterson, RW

Robinson, GM

机构：

[1] IMAT CORP, 3M CTR, ST PAUL, MN 55144 USA

[2] 3M CO, 3M CTR, ST PAUL, MN 55144 USA

[3] BETHEL COLL, DEPT PHYS, ST PAUL, MN 55112 USA

来源：

APPLIED OPTICS | 1997年 / 36卷 / 28期

关键词：

optical interferometry; interferometry; interferometer; profilometry; laser; scanning; on-line; online; metrology; dual-beam; optics; inspection; process; moving surface; moving web; differential; acousto-optic modulator; photodetector; frequency-shift; polarization; Wollaston prism;

D O I：

10.1364/AO.36.007162

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Two dual-beam differential direct-phase-detecting optical interferometers for scanning moving surfaces are described. Two beams from these interferometers are focused similar to 42 mu m apart on moving surfaces, and the difference in their reflected path lengths is measured to provide the surface roughness measurement. These interferometers are exceptionally insensitive to environmental vibrations and to surface physical and chemical factors. Applications discussed include the measurement of the surface roughness of a rotating cylinder and a moving web. (C) 1997 Optical Society of America.

引用

页码：7162 / 7171

页数：10

共 19 条

[1] SCANNING DIFFERENTIAL INTERFEROMETER TO MEASURE INDEX HETEROGENEITY [J].