Structural characterisation of zinc oxide thin films produced by spray pyrolysis

被引：6

作者：

Nunes, P ^{[1
]}

Fernandes, FMB

Silva, RJC

Fortunato, E

Martins, R

机构：

[1] Univ Nova Lisboa, Fac Sci & Technol, Dept Mat Sci, CENIMAT, P-2829516 Caparica, Portugal

[2] Univ Nova Lisboa, CEMOP, P-2829516 Caparica, Portugal

来源：

ADVANCED MATERIALS FORUM I | 2002年 / 230-2卷

关键词：

crystallite size; electrical resistivity; spray pyrolysis; thin films; zinc oxide;

D O I：

10.4028/www.scientific.net/KEM.230-232.599

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this work, we present a study of the effect of temperature, type and concentration of the dopant on the structural characteristics of ZnO thin films produced by spray pyrolysis; the crystallite size has been determined from profile peak shape analysis. These results are compared to the electrical characterisation performed on these materials. The effect of the dopant on the properties of ZnO thin films depends on its characteristics, mainly its ionic radius. Al, Ga and In have been studied as dopants, the best one being In, since it leads to the lowest resistivity.

引用

页码：599 / 602

页数：4

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