Growth of carbon nanotubes by microwave plasma-enhanced chemical vapor deposition at low temperature

被引:73
作者
Choi, YC
Bae, DJ
Lee, YH [1 ]
Lee, BS
Park, GS
Choi, WB
Lee, NS
Kim, JM
机构
[1] Jeonbuk Natl Lab, Dept Semicond Sci & Technol, Jeonju 561756, South Korea
[2] Jeonbuk Natl Lab, Semicond Phys Res Ctr, Jeonju 561756, South Korea
[3] Samsung Adv Inst Technol, Analyt Engn Lab, Suwon 440600, South Korea
[4] Samsung Adv Inst Technol, Display Lab, Suwon 440600, South Korea
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2000年 / 18卷 / 04期
关键词
D O I
10.1116/1.582437
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Carbon nanotubes have been grown on Ni-coated Si substrates by microwave plasma-enhanced chemical vapor deposition with a mixture of methane and hydrogen gases at temperatures ranging from 520 to 700 degrees C. The density and the length of the carbon nanotubes increased with increasing growth temperature. At a growth temperature of 520 degrees C, the carbon nanotubes were curly, whereas the nanotubes were straight and self-aligned upward at temperatures above 600 degrees C. Images from high-resolution transmission electron microscopy showed that the nanotubes were multiwalled, with a few wall structures. The graphitized structures were also confirmed by Raman spectra. We show that the size of Ni grains on Si substrates is correlated to the diameters of the grown carbon nanotubes. (C) 2000 American Vacuum Society. [S0734-2101(00)10004-1].
引用
收藏
页码:1864 / 1868
页数:5
相关论文
共 20 条
  • [1] Field emission from single-wall carbon nanotube films
    Bonard, JM
    Salvetat, JP
    Stockli, T
    de Heer, WA
    Forro, L
    Chatelain, A
    [J]. APPLIED PHYSICS LETTERS, 1998, 73 (07) : 918 - 920
  • [2] Unique characteristics of cold cathode carbon-nanotube-matrix field emitters
    Collins, PG
    Zettl, A
    [J]. PHYSICAL REVIEW B, 1997, 55 (15) : 9391 - 9399
  • [3] Broken symmetry and pseudogaps in ropes of carbon nanotubes
    Delaney, P
    Choi, HJ
    Ihm, J
    Louie, SG
    Cohen, ML
    [J]. NATURE, 1998, 391 (6666) : 466 - 468
  • [4] Storage of hydrogen in single-walled carbon nanotubes
    Dillon, AC
    Jones, KM
    Bekkedahl, TA
    Kiang, CH
    Bethune, DS
    Heben, MJ
    [J]. NATURE, 1997, 386 (6623) : 377 - 379
  • [5] LARGE-SCALE SYNTHESIS OF CARBON NANOTUBES
    EBBESEN, TW
    AJAYAN, PM
    [J]. NATURE, 1992, 358 (6383) : 220 - 222
  • [6] Self-oriented regular arrays of carbon nanotubes and their field emission properties
    Fan, SS
    Chapline, MG
    Franklin, NR
    Tombler, TW
    Cassell, AM
    Dai, HJ
    [J]. SCIENCE, 1999, 283 (5401) : 512 - 514
  • [7] Large-scale production of single-walled carbon nanotubes by the electric-arc technique
    Journet, C
    Maser, WK
    Bernier, P
    Loiseau, A
    delaChapelle, ML
    Lefrant, S
    Deniard, P
    Lee, R
    Fischer, JE
    [J]. NATURE, 1997, 388 (6644) : 756 - 758
  • [8] Kuttel OM, 1998, APPL PHYS LETT, V73, P2113, DOI 10.1063/1.122395
  • [9] Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition
    Lee, CJ
    Kim, DW
    Lee, TJ
    Choi, YC
    Park, YS
    Kim, WS
    Lee, YH
    Choi, WB
    Lee, NS
    Kim, JM
    Choi, YG
    Yu, SC
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (12) : 1721 - 1723
  • [10] Synthesis of aligned carbon nanotubes using thermal chemical vapor deposition
    Lee, CJ
    Kim, DW
    Lee, TJ
    Choi, YC
    Park, YS
    Lee, YH
    Choi, WB
    Lee, NS
    Park, GS
    Kim, JM
    [J]. CHEMICAL PHYSICS LETTERS, 1999, 312 (5-6) : 461 - 468