Planar multibarrier 80/240-GHz heterostructure barrier varactor triplers

Prototype planar four barrier GaAs/Al(0.7)Gao(0.3)As heterostructure barrier varactors (HBV's) for frequency tripling from 80 to 240 GHz have been fabricated using a process in which the device surface channnel is etched prior to the formation of the contact pad-to-anode air-bridge finger, Formation of the device air-bridge finger after etching the surface channel is facilitated by a trench planarization technique and yields a device with minimal parasitic capacitances, Planar four-barrier HBV triplers with nominal 10-mu m diameter anodes have been tested in a crossed-waveguide tripler block; as much as 2 mW of power has been generated at 252 GHz with a flange-to-flange tripling efficiency of 2.5%, These devices are the first planar or multibarrier HBV triplers reported and their output powers are nearly double that of previous whisker-contacted single-barrier HBV's.