Fabrication of tin oxide (SnO2) thin film by electrostatic spray pyrolysis

被引：23

作者：

Zaouk, D

Zaatar, Y

Khoury, A

Llinares, C

Charles, JP

Bechara, J

机构：

[1] Lebanese Univ, Fac Sci 2, Dept Phys, Lab Phys Semi Conducteurs & Energet, Jdeidet, Lebanon

[2] Univ Montpellier 2, Fac Sci & Technol Languedoc, Ctr Elect & Micro Optoelect Montpellier CEM2, Montpellier, France

[3] Supelec Univ Metz, CLOES, Lab Interface Composantes & Microelect, Metz, France

来源：

MICROELECTRONIC ENGINEERING | 2000年 / 51-2卷

关键词：

tin oxide thin films; electrostatic spray pyrolysis; film deposition;

D O I：

10.1016/S0167-9317(99)00526-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Electrostatic spray pyrolysis (ESP) technique has been used for thin film deposition of fluorine-doped tin oxide, which is used for optoelectronic applications. The results show that films are polycrystalline, highly conductive (rho = 9.3 x 10(-4) Omega cm), and have a high transmission (85%) in the visible range. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：627 / 631

页数：5

共 6 条

[1] ELECTRICAL AND OPTICAL-PROPERTIES OF REACTIVELY EVAPORATED INDIUM TIN OXIDE (ITO) FILMS - DEPENDENCE ON SUBSTRATE-TEMPERATURE AND TIN CONCENTRATION [J].