SUBSTRATE PREPARATION FOR THIN-FILM DEPOSITION - A SURVEY

被引：17

作者：

MATTOX, DM

机构：

[1] Sandia Natl Lab, Albuquerque, NM,, USA, Sandia Natl Lab, Albuquerque, NM, USA

来源：

关键词：

This work was supported by the U.S. Department of Energy under Contract DE-AC04-76-DP00789;

D O I：

10.1016/0040-6090(85)90021-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3 / 10

页数：8

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[4]

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[5]

DOMINO FA, 1979, PLATING PLASTICS REC

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[7]

FRANK JM, 1981, 35TH P ANN FREQ CONT, P40

[8]

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MATTOX, DM .