SUBSTRATE PREPARATION FOR THIN-FILM DEPOSITION - A SURVEY

被引:17
作者
MATTOX, DM
机构
[1] Sandia Natl Lab, Albuquerque, NM,, USA, Sandia Natl Lab, Albuquerque, NM, USA
关键词
This work was supported by the U.S. Department of Energy under Contract DE-AC04-76-DP00789;
D O I
10.1016/0040-6090(85)90021-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
23
引用
收藏
页码:3 / 10
页数:8
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