A metallic microcantilever electric contact probe array incorporated in an atomic force microscope

被引:19
作者
Ondarçuhu, T [1 ]
Nicu, L
Cholet, S
Bergaud, C
Gerdes, S
Joachim, C
机构
[1] CNRS, Ctr Elaborat Mat & Etud Struct, F-31055 Toulouse 4, France
[2] CNRS, Lab Automat & Architecture Syst, F-31077 Toulouse, France
关键词
D O I
10.1063/1.1150584
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We present the realization and performance of a multiprobe microcontactor made of an array of metallic microcantilevers inserted in an atomic force microscope (AFM). This instrument permits simultaneous AFM imaging and electrical characterization of nanoscale devices. It is therefore well adapted for future generations of molecular devices. The probes are 2-mu m-wide metallic cantilevers that are brought in contact with 3 mu m x 3 mu m metallic pads of a nanocircuit using a nanopositioning table. The performance of the instrument, tested on mesoscopic metallic wires and carbon nanotubes, shows that the reproducibility of the electrical contact between the probes and the circuit is better than 99.2%. (C) 2000 American Institute of Physics. [S0034-6748(00)00305-1].
引用
收藏
页码:2087 / 2093
页数:7
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