Synthesis and properties of photosensitive polyimide-nanocrystalline titania optical thin films

被引:34
作者
Chang, Wei-Lun [1 ]
Su, Hung-Wei [1 ]
Chen, Wen-Chang [1 ]
机构
[1] Natl Taiwan Univ, Inst Polymer Sci & Engn, Dept Chem Engn, Taipei 106, Taiwan
关键词
Hybrid; Optical films; Polyimide; Titania; Photosensitive; High refractive index; HIGH-REFRACTIVE-INDEX; ORGANIC-INORGANIC HYBRID; NANOCOMPOSITE FILMS; TIO2; SILICA; PMMA; NANOHYBRIDS; POLYMERS; ANATASE;
D O I
10.1016/j.eurpolymj.2009.06.016
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
In this study, synthesis, morphology, and properties of high refractive index photosensitive polyimide-nanocrystalline titania hybrid materials are reported. A soluble polyimide grafted with carboxylic acid or methacrylate groups (P1) was first synthesized from 4,4'-(hexafluoroisopropylidene) diphthalic anhydride (6FDA), 3,5-diaminobenzoic acid (DABA), 4-aminobenzoic acid (4ABA), and 2-hydroxyethyl methacrylate (2HEMA). The residual carboxylic acid groups could undergo an esterification reaction with titanium butoxide to provide an organic-inorganic bonding. On the other hand, the grafted methacrylate groups rendered photosensitive property for photopatterning. A homogeneous hybrid solution was obtained through the formulation on different mole ratios of titanium butoxide/carboxylic acid, water/acid content in a mixed solvent. It was followed by spin-coating, photocuring and post-baking. The titania domain size in the hybrid materials analyzed by high resolution transmission electron microscopy (HRTEM) and X-ray diffraction (XRD) was around 4-7 nm. The prepared optically transparent films had tunable refractive index (1.583 < n < 2.029), relatively good surface planarity and high thermal stability. A fine pattern with a line width of 50 mu m was produced by direct lithographic process on the hybrid films. The present study demonstrates a novel approach for preparing high refractive index hybrid photosensitive materials with patternability. (C) 2009 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2749 / 2759
页数:11
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