Large area submicrometer contact printing using a contact aligner

被引:34
作者
Burgin, T [1 ]
Choong, VE [1 ]
Maracas, G [1 ]
机构
[1] Motorola Inc, Phys Sci Res Lab, Tempe, AZ 85284 USA
关键词
D O I
10.1021/la000038p
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Submicrometer patterns were produced in a thin layer of gold over a 3 in. diameter substrate with an accuracy of greater than or equal to 40 nm and a runout (feature to feature misalignment between the template and the stamped pattern) of approximately 1 mu m, using microcontact printing (mu-CP). Successful pattern reproduction required careful control of the forces exerted on the substrate during the mu-CP process, as well as the encompassing pressure, which was achieved using a custom-built stamp aligner. The use of a thin film stamp bonded to a rigid glass support in conjunction with the aligner significantly improved the runout and eliminated contact of recessed regions of the stamp with the substrate.
引用
收藏
页码:5371 / 5375
页数:5
相关论文
共 22 条
  • [1] Imaging profiles of light intensity in the near field: applications to phase-shift photolithography
    Aizenberg, J
    Rogers, JA
    Paul, KE
    Whitesides, GM
    [J]. APPLIED OPTICS, 1998, 37 (11): : 2145 - 2152
  • [2] Lithography beyond light: Microcontact printing with monolayer resists
    Biebuyck, HA
    Larsen, NB
    Delamarche, E
    Michel, B
    [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1997, 41 (1-2) : 159 - 170
  • [3] Nanoimprint lithography
    Chou, SY
    Krauss, PR
    Renstrom, PJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4129 - 4133
  • [4] Stability of molded polydimethylsiloxane microstructures
    Delamarche, E
    Schmid, H
    Michel, B
    Biebuyck, H
    [J]. ADVANCED MATERIALS, 1997, 9 (09) : 741 - 746
  • [5] Transport mechanisms of alkanethiols during microcontact printing on gold
    Delamarche, E
    Schmid, H
    Bietsch, A
    Larsen, NB
    Rothuizen, H
    Michel, B
    Biebuyck, H
    [J]. JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (18): : 3324 - 3334
  • [6] Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates
    Jackman, RJ
    Brittain, ST
    Whitesides, GM
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (02) : 261 - 266
  • [7] Nano-compact disks with 400 Gbit/in(2) storage density fabricated using nanoimprint lithography and read with proximal probe
    Krauss, PR
    Chou, SY
    [J]. APPLIED PHYSICS LETTERS, 1997, 71 (21) : 3174 - 3176
  • [8] THE USE OF SELF-ASSEMBLED MONOLAYERS AND A SELECTIVE ETCH TO GENERATE PATTERNED GOLD FEATURES
    KUMAR, A
    BIEBUYCK, HA
    ABBOTT, NL
    WHITESIDES, GM
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1992, 114 (23) : 9188 - 9189
  • [9] PATTERNING SELF-ASSEMBLED MONOLAYERS - APPLICATIONS IN MATERIALS SCIENCE
    KUMAR, A
    BIEBUYCK, HA
    WHITESIDES, GM
    [J]. LANGMUIR, 1994, 10 (05) : 1498 - 1511
  • [10] Patterning ligands on reactive SAMs by microcontact printing
    Lahiri, J
    Ostuni, E
    Whitesides, GM
    [J]. LANGMUIR, 1999, 15 (06) : 2055 - 2060