[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[3] Natl Univ Tainan, Dept Elect Engn, Okayama 700, Japan
[4] Nibg Chi Univ Technol, Dept Mat Engn, Taishan 24301, Taiwan
[5] Micro Syst Technol Ctr, Ind Technol Res S, Tainan 709, Taiwan