共 26 条
[11]
Hunter I. W., 1992, IEEE SOL STAT SENS A, P178
[12]
Kojima S., 1992, JSME INT J 1, V35
[13]
MOULSON A, 1990, ELECTROCERAMICS, P293
[14]
OGURO K, 1992, J MICROMACHINE SOC, V5, P27
[15]
Valve-less diffuser micropumps fabricated using thermoplastic replication
[J].
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS,
1997,
:305-310
[17]
PEI QB, 1993, SMART MATER STRUCT, V2, P1
[18]
PELRINE P, 1992, P 3 INT S MICR MACH
[19]
Electrostriction of polymer films for microactuators
[J].
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS,
1997,
:238-243