Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

被引：55

作者：

Atar, E

Sarioglu, C

Demirler, U

Kayali, ES

Cimenoglu, H ^{[1
]}

机构：

[1] Istanbul Tech Univ, Dept Met & Mat Engn, TR-34469 Istanbul, Turkey

[2] Gebze Inst Technol, Dept Mat Sci & Engn, TR-41400 Gebze, Kocaeli, Turkey

[3] Marmara Univ, Dept Met & Mat Engn, TR-81040 Istanbul, Turkey

来源：

SCRIPTA MATERIALIA | 2003年 / 48卷 / 09期

关键词：

microindentation; residual stresses; thin films; X-ray diffraction;

D O I：

10.1016/S1359-6462(03)00019-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The residual stresses in ceramic thin films obtained by the indentation method have been found to be three times higher than those of the X-ray diffraction method. This discrepancy can be eliminated by setting the geometrical factor for the Vickers pyramid indenter to 1 in the relevant equation of the indentation method. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.

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页码：1331 / 1336

页数：6

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