A generalized mixture model for categorized-components problems with an application to a photoresist-coating experiment

被引:16
作者
Cornell, JA [1 ]
Ramsey, PJ [1 ]
机构
[1] Univ Florida, Dept Stat, Gainesville, FL 32611 USA
关键词
dissolution rate; double-lattice; double-Scheffe model; interaction model; nonlinear blending;
D O I
10.2307/1271392
中图分类号
O21 [概率论与数理统计]; C8 [统计学];
学科分类号
020208 ; 070103 ; 0714 ;
摘要
The categorized-components mixture problem involves blending components from different categories Each category, called a major component, must be represented in every mixture by one or more of its minor components. Modeling the component blending means modeling the interor between-category blending, especially how these blending properties impact or influence the intra-or within-category blending properties. As expected, experimental designs and model forms for studying the inter-and intra-category blending of the minor components are generalizations of the simplex designs and the standard Scheffe-type models used in the single-category mixture problem. The analysis of data from a photoresist-coating mixture experiment, in which two types of resins make up two major components and each resin type consists of two minor resins, serves to illustrate the impact that inter-category blending can have on the intra-category blending of the minor resins.
引用
收藏
页码:48 / 61
页数:14
相关论文
共 13 条
[2]   Interaction models as alternatives to low-order polynomials [J].
Cornell, JA ;
Montgomery, DC .
JOURNAL OF QUALITY TECHNOLOGY, 1996, 28 (02) :163-176
[3]   MIXTURE PROBLEM FOR CATEGORIZED COMPONENTS [J].
CORNELL, JA ;
GOOD, IJ .
JOURNAL OF THE AMERICAN STATISTICAL ASSOCIATION, 1970, 65 (329) :339-355
[4]  
Cornell JA, 2002, EXPT MIXTURES DESIGN
[5]   CHARACTERIZATION OF POSITIVE PHOTORESIST [J].
DILL, FH ;
HORNBERGER, WP ;
HAUGE, PS ;
SHAW, JM .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) :445-452
[6]  
LAMBRAKIS DP, 1968, J R STAT SOC B, V30, P123
[7]  
LAMBRAKIS DP, 1969, J R STAT SOC B, V31, P276
[8]  
MACK CA, 1993, MICROLITHOGRAPHY APR, P25
[9]  
MACK CA, 1993, MICROLITHOGRAPHY JAN, P27
[10]  
SCHEFFE H, 1963, J ROY STAT SOC B, V25, P235