Analysis of short range forces in optomechanical devices with a nanogap

被引：21

作者：

Pernice, Wolfram H. P. ^{[1
]}

Li, Mo ^{[1
]}

Garcia-Sanchez, Daniel ^{[1
]}

Tang, Hong X. ^{[1
]}

机构：

[1] Yale Univ, Dept Elect Engn, New Haven, CT 06511 USA

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 12期

基金：

美国国家科学基金会;

关键词：

CASIMIR FORCE; MICROELECTROMECHANICAL SYSTEMS;

D O I：

10.1364/OE.18.012615

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We employ the finite-difference time-domain method to calculate the dominant short range forces in optomechanical devices, Casimir and gradient optical forces. Numerical results are obtained for typical silicon optomechanical devices and are compared to metallic reference structures, taking into account geometric and frequency dispersion of silicon. Our results indicate that although a small gap is desirable for operating optomechanical devices, the Casimir force offsets the gradient force in strongly coupled optomechanical devices, which has to be taken into account in the design of optical force tunable devices. (C) 2010 Optical Society of America

引用

页码：12615 / 12621

页数：7

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