Neutron reflectivity on nanoporous poly(methylsilsesquioxane) thin films

被引：21

作者：

Kim, HC

Volksen, W

Miller, RD

Huang, E

Yang, GY

Briber, RM

Shin, K

Satija, SK

机构：

[1] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA

[2] IBM Corp, TJ Watson Res Ctr, Valhalla, NY 10595 USA

[3] Univ Maryland, Dept Mat & Nucl Engn, College Pk, MD 20742 USA

[4] NIST, NCNR, Gaithersburg, MD 20899 USA

来源：

CHEMISTRY OF MATERIALS | 2003年 / 15卷 / 03期

关键词：

D O I：

10.1021/cm0207550

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The depth porosity profile of nanoporous poly(methylsilsesquioxane) thin films was investigated with neutron reflectivity using toluene-d8 or D2O as probes. The nanoporous films show a selective sorption behavior and swell when they are exposed to the selective solvent. The results show a localized higher porosity at the interface between porous films and silicon substrates, which suggests more careful control of the spatial pore distribution is needed to meet the thermo-mechanical stability requirements of porous low-k materials.

引用

收藏

页码：609 / 611

页数：3

相关论文

共 19 条

[1] New polymer synthesis by nitroxide mediated living radical polymerizations [J].

Hawker, CJ ;

Bosman, AW ;

Harth, E .

CHEMICAL REVIEWS, 2001, 101 (12) :3661-3688

[2] Supramolecular approaches to nanoscale dielectric foams for advanced microelectronic devices [J].

Hawker, CJ ;

Hedrick, JL ;

Miller, RD ;

Volksen, W .

MRS BULLETIN, 2000, 25 (04) :54-58

[3] HIGH-TEMPERATURE POLYMER FOAMS [J].

HEDRICK, J ;

LABADIE, J ;

RUSSELL, T ;

HOFER, D ;

WAKHARKER, V .

POLYMER, 1993, 34 (22) :4717-4726

[4]

Hedrick JL, 1998, MATER RES SOC SYMP P, V519, P65

[5]

Hedrick JL, 1998, ADV MATER, V10, P1049, DOI 10.1002/(SICI)1521-4095(199809)10:13<1049::AID-ADMA1049>3.0.CO

[6]

2-F

[7] Starlike polymeric architectures by atom transfer radical polymerization: Templates for the production of low dielectric constant thin films [J].

Heise, A ;

Nguyen, C ;

Malek, R ;

Hedrick, JL ;

Frank, CW ;

Miller, RD .

MACROMOLECULES, 2000, 33 (07) :2346-2354

[8] Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering [J].

Huang, E ;

Toney, MF ;

Volksen, W ;

Mecerreyes, D ;

Brock, P ;

Kim, HC ;

Hawker, CJ ;

Hedrick, JL ;

Lee, VY ;

Magbitang, T ;

Miller, RD ;

Lurio, LB .

APPLIED PHYSICS LETTERS, 2002, 81 (12) :2232-2234

[9] Metal-catalyzed living radical polymerization [J].

Kamigaito, M ;

Ando, T ;

Sawamoto, M .

CHEMICAL REVIEWS, 2001, 101 (12) :3689-3745

[10] Selective sorption of nanoporous poly(methyl silsesquioxane) [J].

Kim, HC ;

Wilds, JB ;

Hinsberg, WD ;

Johnson, LR ;

Volksen, W ;

Magbitang, T ;

Lee, VY ;

Hedrick, JL ;

Hawker, CJ ;

Miller, RD ;

Huang, E .

CHEMISTRY OF MATERIALS, 2002, 14 (11) :4628-4632