Effects of primary powders on PNN-PT-PZ piezoelectric thick films prepared by aerosol deposition method

被引：5

作者：

Kaga, Y ^{[1
]}

Kikuchi, H ^{[1
]}

Watanabe, J ^{[1
]}

机构：

[1] Hitachi Met Ltd, Adv Elect Res Lab, Kumagaya, Saitama 3600843, Japan

来源：

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 2003年 / 111卷 / 01期

关键词：

aerosol deposition method; PNN-PT-PZ; piezoelectric thick film; crystallinity; piezoelectric constant;

D O I：

10.2109/jcersj.111.73

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Effects of primary powders on PNN-PT-PZ piezoelectric thick films prepared by aerosol deposition method (ADM) have been studied. Powders clashed in strong impact occurred by collision between primary powder and substrate during the deposition were selectively deposited. Primary powders with high crystallinity were effective for producing thick films having high piezoelectric properties. The piezoelectric thick films in thickness of 38mum formed by using PNN-PT-PZ piezoelectric ceramics powders with high crystallinity were annealed at 800degreesC for 1h, so that their piezoelectric constants (d(31)) were-189 pm/V.

引用

页码：73 / 76

页数：4

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