The In-As-Sb phase diagram and LPE growth of InAsSb layers on InAs at extremely low temperatures

被引:6
作者
Popov, AS
Koinova, AM
Tzeneva, SL
机构
[1] Univ Sofia, Semicond Phys Dept, BU-1126 Sofia, Bulgaria
[2] Univ Sofia, Inst Semicond Phys & Technol, BU-1126 Sofia, Bulgaria
关键词
D O I
10.1016/S0022-0248(97)00509-5
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A calculation of the In-As-Sb phase diagram in the low-temperature range 300 400 degrees C has been made applying the rare simple solution model, By using the calculated data an extremely low temperature LPE was performed for growing InAs1-xSbx layers on InAs substrates at temperatures as low as 300 degrees C. It was shown that high-quality layers can be grown on InAs with x up to 0.26. SEM microprobe compositional analysis and X-ray diffraction analysis confirmed their homogeneity and high crystal quality and the promise of this material for mid-infrared optoelectronic devices. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:338 / 343
页数:6
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