Realization of free-space optical pickup head with stacked Si-based phase elements

被引：14

作者：

Chang, JY ^{[1
]}

Wang, CM

Lee, CC

Shih, HF

Wu, ML

机构：

[1] Natl Cent Univ, Inst Opt Sci, Chungli 32054, Taiwan

[2] Natl Cent Univ, Ctr Opt Sci, Chungli 32054, Taiwan

[3] Natl Chung Hsing Univ, Taichung 402, Taiwan

[4] NeoStones MicroFabricat Corp, Hsinchu 300, Taiwan

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2005年 / 17卷 / 01期

关键词：

diffractive optical elements; microoptoelectrome-chanical systems (MOEMS); pickup module; SiNx membrane;

D O I：

10.1109/LPT.2004.836896

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650-nm laser diode, a 45degrees silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were suspended on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 mum.

引用

页码：214 / 216

页数：3

共 10 条

[1] Silicon-based transmissive diffractive optical element [J].