Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage

被引：189

作者：

Yao, Qing ^{[1
]}

Dong, J. ^{[1
]}

Ferreira, P. M. ^{[1
]}

机构：

[1] Univ Illinois, Dept Mech & Ind Engn, MEB, Urbana, IL 61801 USA

来源：

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 2007年 / 47卷 / 06期

基金：

美国国家科学基金会;

关键词：

micropositioning; nanopositioning; XY stage; parallel kinematics; piezoelectric actuator; flexure stage;

D O I：

10.1016/j.ijmachtools.2006.07.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper reports on a novel piezo-driven, parallel-kinematic, micropositioning XY stage. This monolithic design is comprised of parallelogram four-bar linkages, flexure hinges, and piezoelectric actuators. Kinematic and dynamic analysis shows that the mechanical structure of the stage has a large work space, high bandwidth and good linearity. The stage system was run in open-loop mode to measure the step response and frequency response. The results show that the resonation frequencies of the two vibration modes are 563 and 536 Hz and the damping ratios are 0.049 and 0.0228. Two fiber optic sensors were added to the system to build a closed-loop positioning system. Linear and circular contouring performance in closed-loop mode suggests high scanning performance for such parallel-kinematic stages. The positioning resolution of the stage, limited only by the feedback sensors used, is about 20 nm. (C) 2006 Elsevier Ltd. All rights reserved.

引用

页码：946 / 961

页数：16

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