Spectral analysis through electromechanical coupling

被引：7

作者：

Cretu, E ^{[1
]}

Bartek, M ^{[1
]}

Wolffenbuttel, RF ^{[1
]}

机构：

[1] Delft Univ Technol, ITS Et, DIMES, Elect Instrumentat Lab, NL-2600 GA Delft, Netherlands

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 85卷 / 1-3期

关键词：

accelerometer; MEMS; spectral analysis;

D O I：

10.1016/S0924-4247(00)00414-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A general dynamic model for a momentum-actuated accelerometer is constructed, where both differential and common-mode actuation voltages are considered. The equivalent quasi-static model is applied to design a measurement scheme for low-frequency accelerations. A more general method for real-time spectral analysis of mechanical vibrations is presented, which relies on a feedback loop based on capacitive sensing, on-chip signal conditioning and electrostatic actuation. Both common- and differential-mode voltages are used to tune the accelerometer spectral characteristic, in order to extract the spectral component set by the electrostatic actuation. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：23 / 32

页数：10