Insulated surface discharge for metastables driven processing at atmospheric pressure

被引:6
作者
Korzec, D
Finantu-Dinu, EG
Schwabedissen, A
Engemann, J
Ráhel, J
Stefecka, M
Imahori, Y
Kando, M
机构
[1] Univ Gesamthsch Wuppertal, Microstruct Res Ctr Fmt, D-42119 Wuppertal, Germany
[2] Comenius Univ, Fac Math Phys & Informat, Bratislava 84248, Slovakia
[3] Shizuoka Univ, Grad Sch Elect Sci & Technol, Hamamatsu, Shizuoka 4328011, Japan
关键词
surface discharge; barrier discharge; metastable helium; atmospheric pressure glow;
D O I
10.1016/S0257-8972(03)00086-0
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The insulated surface discharge (ISD) in helium under atmospheric pressure operated with voltage of 1-3 kV in frequency range from 1 to 10 kHz is investigated. The influence of the insulating film on the operation of ISD is discussed. The presence of poly-vinyl-chloride (PVC) foil or silicon polymer film on the surface of the discharge electrode prolongs the lifetime of metastable excited helium atoms up to 17 or 50 mus, respectively. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:228 / 232
页数:5
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