Mechanisms inducing compressive stress during electrodeposition of Ni

被引:85
作者
Hearne, SJ [1 ]
Floro, JA [1 ]
机构
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
D O I
10.1063/1.1819972
中图分类号
O59 [应用物理学];
学科分类号
摘要
The evolution of stress during electrodeposition of Ni films on Au substrates has been investigated as a function of bath chemistry and deposition conditions to examine the microstructural origins of the compressive stress observed during deposition from an additive-free sulfamate bath. Three likely mechanisms for the generation of compressive stress in this system were investigated: interstitial hydrogen/impurity incorporation, capillarity stress, and a chemical-potential gradient driven atom incorporation model. Only the last model, the chemical-potential gradient model, could not be discounted as the active mechanism. However, further study is required to verify that this is the primary compressive stress generation mechanism. (C) 2005 American Institute of Physics.
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页数:6
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共 33 条
[1]   STRUCTURE AND INTERNAL-STRESS IN ULTRATHIN SILVER FILMS DEPOSITED ON MGF2 AND SIO SUBSTRATES [J].
ABERMANN, R ;
KRAMER, R ;
MASER, J .
THIN SOLID FILMS, 1978, 52 (02) :215-229
[2]   EFFECT OF IMPURITIES ON INTRINSIC STRESS IN THIN NI FILMS [J].
ALEXANDER, PM ;
HOFFMAN, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :96-98
[3]   DIFFUSION ELASTIC PHENOMENA IN NICKEL AND COBALT ELECTRODEPOSITS PLATED ON TO STRIP CATHODES [J].
ARMYANOV, S ;
SOTIROVA, G .
SURFACE & COATINGS TECHNOLOGY, 1988, 34 (04) :441-454
[4]   Microstructural characterization and hardness of electrodeposited nickel coatings from a sulphamate bath [J].
Banovic, SW ;
Barmak, K ;
Marder, AR .
JOURNAL OF MATERIALS SCIENCE, 1998, 33 (03) :639-645
[5]  
BARBOUR JC, 1996, HDB MODERN ION BEAM, V1, pCH5
[6]   X-ray characterization of residual stresses in electroplated nickel used in LIGA technique [J].
Basrour, S ;
Robert, L .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2000, 288 (02) :270-274
[7]   SURFACE AND INTERFACE STRESS EFFECTS IN THIN-FILMS [J].
CAMMARATA, RC .
PROGRESS IN SURFACE SCIENCE, 1994, 46 (01) :1-38
[8]   Surface stress model for intrinsic stresses in thin films [J].
Cammarata, RC ;
Trimble, TM ;
Srolovitz, DJ .
JOURNAL OF MATERIALS RESEARCH, 2000, 15 (11) :2468-2474
[9]   Origin of compressive residual stress in polycrystalline thin films [J].
Chason, E ;
Sheldon, BW ;
Freund, LB ;
Floro, JA ;
Hearne, SJ .
PHYSICAL REVIEW LETTERS, 2002, 88 (15) :4
[10]   Stress field in sputtered thin films: Ion irradiation as a tool to induce relaxation and investigate the origin of growth stress [J].
Debelle, A ;
Abadias, G ;
Michel, A ;
Jaouen, C .
APPLIED PHYSICS LETTERS, 2004, 84 (24) :5034-5036