Micropatterned epitaxial (Pb,La)(Zr,Ti)O3 thin films on Nb-doped SrTiO3 substrates by a chemical solution deposition process with resist molds

Arrays of lead lanthanum zirconate titanate pillars were fabricated on niobium-doped (001) strontium titanate substrates using a chemical solution deposition method with resist molds. Periodic arrays of submicron ferroelectric pillars with high crystallinity are required to produce high-quality tunable photonic-crystal devices. The relationship between the crystallinity and width of the pillars was investigated. The highest crystallinity was obtained at a width of 0.67 mum. All the pillars exhibited ferroelectric strain. Since this width is in the order of that of optical wavelengths, this process and the periodic structures produced have potential applications in fabricating two-dimensional tunable photonic crystals. (C) American Institute of Physics.