FABRICATION OF SOL-GEL DERIVED FERROELECTRIC PB0.865LA0.09ZR0.65TI0.35O3 OPTICAL WAVE-GUIDES

被引：28

作者：

BAUDE, PF

YE, C

TAMAGAWA, T

POLLA, DL

机构：

[1] Department of Electrical Engineering, Microelectromechanical Systems Center, University of Minnesota, Minneapolis

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 73卷 / 11期

关键词：

D O I：

10.1063/1.353928

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Crack-free transparent ferroelectric Pb0.865La0.09Zr0.65Ti0.3503 [PLZT (9/65/35)] thin films have been deposited on silicon substrates using the sol-gel deposition technique. An intermediate layer of Pb0.90La0.10Ti0.97503 (PLT) was used to improve the PLZT's optical quality and to reduce the amount of film craoking. Wet chemical etching, plasma etching, and reactive ion etching were investigated as means of realizing the necessary waveguide structures. Waveguiding was observed in 2-4 mm long by 20 mum wide PLZT (9/65/35) ridge waveguides fabricated by reactive ion beam etching.

引用

页码：7960 / 7962

页数：3

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